Nano-Scratch Testing of Thin Films

Nano-scratch testing provides a rapid, local method for investigating the mechanical behavior of thin films. 

Thin films and coatings with thicknesses under 100 nm are an intrinsic part of modern technology, finding applications in semiconductors, optics, flexible electronics, and functionalized surfaces. To ensure full functionality in these coating systems, the coatings must be cohesive and well-adhered to their substrate, whether that is another coating, a silicon wafer, or precision optics. For a system to perform this application, three factors are important to remember: high resolution sensing, lateral stiffness, and scanning actuation. In this application note, nano-scratch measurements are successfully demonstrated on two different thin films with thicknesses between 60-100 nm.