While typical nanoindentation systems feature force-sensing technologies that are based on precision-machined and assembled components, FemtoTools uses semiconductor fabrication technology to monolithically machine the entire force sensor out of single-crystalline silicon wafers.
Our force sensors outperform conventional technologies in sensitivity, resolution, and repeatability due to these higher fabrication tolerances. Further, due to the small size of the MEMS element, our sensor’s mass is orders of magnitude smaller than conventional technologies, resulting in a high resonance frequency and dynamic performance to measure fast events or to conduct fatigue or cyclic tests at higher frequencies.
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