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FT-I04 Femto-Indenter, a standalone MEMS-based nanoindenter for material property analysis.

i04

FT-NMT04 nanoindenter for in-situ SEM/FIB material analysis.

NMT04

FemtoTools FT-MTA03 system highlighting its integrated microscope and precision sensing probe for microstructure analysis.

MTA03

iX05 nanoindenter, a standalone MEMS-based nanoindenter for material property analysis in a wide range of operando conditions: high-temperature nanoindentation. low-temperature nanoindentation, high strain rates nanoindentation ...

iX05

SEM image of Berkovich indentations revealing mechanical properties of a material via nanoindentation.
Nanoindentation / Mechanical Microscopy

Nanoindentation
Mechanical Microscopy
Correlative Mechanical Microscopy
Strain-Rate Control

 

High-temperature module for nanoindentation tests up to 400°C with inert gas atmosphere.
Temperature dependent testing

High-Temperature Testing

Scratch test topography providing quantitative data on material hardness and wear resistance.
Scratch Testing

Scratch Testing

Micro-pillar after compression in an SEM showing shear plane development.
In situ micromechanical testing

Micro-Pillar Compression
Micro-Cantilever Testing
Micro-Tensile Testing
Simultaneous Mechanical Testing with STEM/EBSD

MEMS testing apparatus measuring stiffness in micro-manufactured components for yield calculation.
MEMS testing

MEMS Mechanical Testing

Close-up of a spherical ruby indenter tip used for soft material characterization.
Soft-Material Testing

Soft-Material Testing

In-Situ SEM, High Temperature
Microcompression of Silicon

High temperature microcompression is an exciting application that allows uniaxial stress-strain behavior to be measured as a function of temperature for site-specific microstructural features:

grains with a desired orienta-tion, grain boundaries, or secondary phases. However, it can be quite technically demanding as it requires a system capable of displacement control, high temperature operation, and in situ observation to facilitate the testing. In this application note, high temperature microcompression of lithography silicon pillars is demon-strated at temperatures up to

FT-I04 Femto-Indenter positioning its tip above sample holders for precision measurement.
FT-S Microforce Sensing Probe, versatile in measuring forces with various tip options.
Illustration of nano-tensile testing setup with SEM and STEM integration.

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Download the full application note and learn more about:

  • High-temperature in-situ SEM testing
  • Requirements that need to be fulfilled for a measurement system to conduct this type of measurement
  • Results of high-temperature silicon micropillar compression and comparison with the literature

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