The FT-MTA03 Micromechanical Testing and Assembly Station is a highly versatile micromechanical testing instrument. It combines the capabilities of a nanoindenter, a stylus profilometer, a micro tensile tester and a microstructure analyzer.

The FT-NMT03 Nanomechanical Testing System is a nanorobotic system for the direct and accurate, in-situ SEM/FIB measurement of the mechanical properties of nanostructures. Testing principles such as compression, tensile, cyclic or fracture tests are enabled by applying a load with a microforce sensor onto the nanostructures while using position encoders to measure their deformation.

Micro-Electro-Mechanical Systems (MEMS) combine electrical as well as mechanical aspects on a single chip. For this reason, not only electrical, but also mechanical properties of these sensors and actuators provide valuable insights into their functionality and reliability.

The FT-MPS02 MEMS Probestation is a wafer-level MEMS testing instrument that allows for the fast, user-friendly and simultaneous testing of mechanical, electrical and geometrical properties on MEMS chips.

FT-MTA03 Micromechanical Testing And Assembly SystemFT-NMT03 Nanomechanical Testing SystemFT-MPS02 MEMS Probestation