Micro-Electro-Mechanical Systems (MEMS) combine electrical as well as mechanical aspects on a single chip. For this reason, not only electrical, but also mechanical properties of these sensors and actuators provide valuable insights into their functionality and reliability.

The FT-MPS02 MEMS Probestation is a wafer-level MEMS testing instrument that allows for the fast, user-friendly and simultaneous testing of mechanical, electrical and geometrical properties on MEMS chips.

The FT-MTA02 Micromechanical Testing and Assembly Station is a highly versatile micromechanical testing instrument. Within a few minutes, the instrument can be reconfigured for almost any mechanical testing and manipulation task in the fields of material science, biomaterials testing and micro- and nanosystems characterization.The instrument is designed to perform highly accurate probe-based force-position-time measurements, which enable a large number of testing modes.

FT-MPS02 MEMS ProbestationFT-MTA02 Micromechanical Testing And Assembly System