MEMS / NEMS Testing

Microsystems/MEMS Publications

K. Poletkin, Z. Lu, B. den Hartogh, U. Wallrabe and V. Badilita, 'Stability and spring constant investigation for micromachined inductive suspensions: theoretical analysis vs. experimental results', J. Phys.: Conf. Ser., vol. 557, p. 012133, 2014.

N. Lange, F. Wippermann, E. Beckert, R. Eberhardt and A. Tunnermann, 'Polymer-Based Pull-In Free Electrostatic Microactuators Fabricated on Wafer-Level', Journal of Microelectromechanical Systems, vol. 24, no. 4, pp. 949-957, 2015.

B. Gaihre, G. Alici, G. Spinks and J. Cairney, 'Pushing the Limits for Microactuators Based on Electroactive Polymers', Journal of Microelectromechanical Systems, vol. 21, no. 3, pp. 574-585, 2012.

M. Shin, A. Gerratt, C. Metallo, A. Brindle, B. Kierstead and R. White, 'Characterization of a micromachined parylene-based thermal C-shape actuator', J. Micromech. Microeng., vol. 21, no. 9, p. 095028, 2011.

A. Maziz, C. Plesse, C. Soyer, C. Chevrot, D. Teyssié, E. Cattan and F. Vidal, 'Demonstrating kHz Frequency Actuation for Conducting Polymer Microactuators', Adv. Funct. Mater., vol. 24, no. 30, pp. 4851-4859, 2014.

Y. Gao, Z. You and J. Zhao, 'Electrostatic comb-drive actuator for MEMS relays/switches with double-tilt comb fingers and tilted parallelogram beams', J. Micromech. Microeng., vol. 25, no. 4, p. 045003, 2015.

D. Burns, J. Jones and M. Li, 'Mechanical behavior of microelectromechanical microshutters', Nanoengineering: Fabrication, Properties, Optics, and Devices XI, 2014.

J. Wooldridge, J. Blackburn, A. Muniz-Piniella, M. Stewart, T. Shean, P. Weaver and M. Cain, 'Finite Element Analysis of the Vertical Levitation Force in an Electrostatic MEMS Comb Drive Actuator', J. Phys.: Conf. Ser., vol. 472, p. 012002, 2013.

M. Kim, J. Park and B. Choi, 'Measurement and analysis of micro-scale adhesion for efficient transfer printing', J. Appl. Phys., vol. 110, no. 2, p. 024911, 2011.

J. Marzouk, S. Arscott, A. El Fellahi, K. Haddadi, T. Lasri, C. Boyaval and G. Dambrine, 'MEMS probes for on-wafer RF microwave characterization of future microelectronics: design, fabrication and characterization', J. Micromech. Microeng., vol. 25, no. 7, p. 075024, 2015.

Z. Lu, K. Poletkin, U. Wallrabe and V. Badilita, 'Performance Characterization of Micromachined Inductive Suspensions Based on 3D Wire-Bonded Microcoils', Micromachines, vol. 5, no. 4, pp. 1469-1484, 2014.

D. Burns, L. Oh, M. Li, D. Kelly, A. Kutyrev and S. Moseley, '2-D Electrostatic Actuation of Microshutter Arrays', Journal of Microelectromechanical Systems, pp. 1-7, 2015.

A. Bontemps, S. Grondel, T. Vanneste, S. Dupont and E. Cattan, 'Modeling and evaluation of power transmission of flapping wing nano air vehicle', 2014 IEEE/ASME 10th International Conference on Mechatronic and Embedded Systems and Applications (MESA), 2014.

H. Bilen, M. Hocaoglu, E. Baran, M. Unel and D. Gozuacik, 'Novel parameter estimation schemes in microsystems', 2009 IEEE International Conference on Robotics and Automation, 2009.

M. Marelli, N. Gadhari, G. Boero, M. Chiquet and J. Brugger, 'Single-cell 3D Bio-MEMS environment with engineered geometry and physiologically relevant stiffnesses', 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS), 2014.

O. Ergeneman, M. Suter, G. Chatzipirpiridis, J. Zurcher, S. Graf, S. Pane, C. Hierold and B. Nelson, 'Characterization and actuation of a magnetic photosensitive polymer cantilever', 2009 International Symposium on Optomechatronic Technologies, 2009.

Nanosystems/NEMS Publications

W. Wang, S. Dai, X. Li, J. Yang, D. Srolovitz and Q. Zheng, 'Measurement of the cleavage energy of graphite', Nature Communications, vol. 6, p. 7853, 2015.

B. KRATOCHVIL, L. DONG, L. ZHANG and B. NELSON, 'Image-based 3D reconstruction using helical nanobelts for localized rotations', Journal of Microscopy, vol. 237, no. 2, pp. 122-135, 2010.

S. Boles, A. Sedlmayr, O. Kraft and R. Mönig, 'In situ cycling and mechanical testing of silicon nanowire anodes for lithium-ion battery applications', Appl. Phys. Lett., vol. 100, no. 24, p. 243901, 2012.

S. Boles, C. Thompson, O. Kraft and R. Mönig, 'In situ tensile and creep testing of lithiated silicon nanowires', Appl. Phys. Lett., vol. 103, no. 26, p. 263906, 2013.

D. Magagnosc, R. Ehrbar, G. Kumar, M. He, J. Schroers and D. Gianola, 'Tunable Tensile Ductility in Metallic Glasses', Sci. Rep., vol. 3, 2013.

T. Brugarolas, D. Gianola, L. Zhang, G. Campbell, J. Bassani, G. Feng and D. Lee, 'Tailoring and Understanding the Mechanical Properties of Nanoparticle-Shelled Bubbles', ACS Appl. Mater. Interfaces, vol. 6, no. 14, pp. 11558-11572, 2014.

M. Hottes, F. Dassinger, F. Muench, M. Rauber, C. Stegmann, H. Schlaak and W. Ensinger, 'Patterned arrays of capped platinum nanowires with quasi-elastic mechanical response to lateral force', Appl. Phys. Lett., vol. 106, no. 5, p. 053109, 2015.

[33]D. Magagnosc, G. Kumar, J. Schroers, P. Felfer, J. Cairney and D. Gianola, 'Effect of ion irradiation on tensile ductility, strength and fictive temperature in metallic glass nanowires', Acta Materialia, vol. 74, pp. 165-182, 2014.

X. Zhao, D. Strickland, P. Derlet, M. He, Y. Cheng, J. Pu, K. Hattar and D. Gianola, 'In situ measurements of a homogeneous to heterogeneous transition in the plastic response of ion-irradiated Ni microspecimens', Acta Materialia, vol. 88, pp. 121-135, 2015.

M. Mikczinski, G. Josefsson, G. Chinga-Carrasco, E. Gamstedt and S. Fatikow, 'Nanorobotic Testing to Assess the Stiffness Properties of Nanopaper', IEEE Trans. Robot., vol. 30, no. 1, pp. a Materialia, vol. 88, pp. 121-135, 2015.