3-Axis in-situ SEM Nanoindenter4-Axis in-situ SEM Nanoindenter4-Axis in-situ SEM Nanoindenter for Correlative STEM/EBSD Imaging 5-Axis in-situ SEM Nanoindenter
3-Axis in-situ SEM Nanoindenter4-Axis in-situ SEM Nanoindenter4-Axis in-situ SEM Nanoindenter for Correlative STEM/EBSD Imaging 5-Axis in-situ SEM Nanoindenter

Specifications

Force Sensing
- Maximum force: 200 mN
- Force noise floor: 0.5 nN (at 10 Hz)
- Measurement frequency up to 96 kHz

Displacement Sensing (coarse)
- Displacement range: 21 mm
- Displacement noise floor: 1 nm (at 10 Hz)
- Measurement frequency: 50 Hz

Displacement Sensing (fine)
- Displacement range: 25 μm
- Displacement noise floor: 0.05 nm (at 10 Hz)
- Measurement frequency up to 96 kHz

3, 4 and 5-axis force sensor to sample alignment
- X, Y, Z closed-loop positioning range: 21mm x 12mm x 12 mm
- X, Y, Z closed-loop positioning noise floor: 1 nm
- Sample tilt range: 90° (FT-NMT04-XYZ-RT)
- Sample rotation range: 360° (FT-NMT04-XYZ-R), 180° (FT-NMT04-XYZ-RT)
- Sample  angular noise floor: 35 micro-deg