The FT-NMT03 Nanomechanical Testing System is a nanorobotic system for the direct and accurate in-situ SEM/FIB measurement of the mechanical properties of nanostructures. Testing principles such as compression, tensile, cyclic or fracture tests are enabled by applying a load with a microforce sensor onto the nanostructures while using position encoders to measure their deformation. From the resulting force-versus-deformation (stress-versus-strain) curves, the material properties of these nanostructures are quantitatively determined. Furthermore, through the combination with sample holders that feature electrical connections, the combined electrical and mechanical properties of nanostructures can be quantified.
Most nanomechanical metrology applications require complex sample preparation steps prior to the measurement. For this reason, the FT-NMT03 also features micro- and nanohandling capabilities using either force-sensing microgrippers or sharp, force-sensing tungsten tips, which enable the pickup, placing and attaching of nanostructures to a testing substrate. This combination of electro-mechanical metrology and nanohandling capabilities provides a complete solution for most nanomechanical testing applications.