Nanoindentation

The most important application of nanoindentation is the measurement and the mapping of properties, such as the hardness and the elastic modulus. Therefore, the most important features of a nanoindenter are its ability to detect small changes in these properties as well as the spatial resolution at which these properties can be measured.

The FT-IO4 Femto-Indenter and the FT-NMT04 in-situ SEM Nanoindenter feature two key advantages related to the MEMS-based core technology: high repeatability and ultra-low noise floors in both force and displacement sensing. As illustrated by the data of hardness and modulus measurements on fused silica, the FemtoTools nanoindenters showcase an unprecedented repeatability. As a direct consequence, this precision enables to detect ultra-small variations in hardness and modulus values.

To demonstrate this capability, results from CSM nanoindentation measurements on various samples are shown. The FemtoTools nanoindenters enables the detection of small variations in modulus (1%) corresponding to e.g. changes in the crystal orientation. This can be qualitatively compared to the EBSD map (taken from a different location on the same sample).

To study the variations of mechanical properties in different specimens, over heterogeneous microstructures or at interfaces, the FemtoTools nanoindenters feature sample stages combining a large range (from 12x12 to 130x130 mm) with a 1 nm position noise floor that enables precise and repeatable targeting of specific locations. It also enables the automated mapping of mechanical properties over large areas with high-resolution. The included FemtoTools Software Suite provides extensive data analysis and visualization tools, with profiles, statistics and color maps of all measured and derived properties.