MEMS-based microactuators are used for various applications, such as camera focus systems, optical beam deflection micromirrors and ultrasonic emitters. These microactuators are used to generate a controlled deflection (in position-controlled applications) or precise force (in force-controlled applications). Therefore, the FT-MTA03 is used for the accurate measurement of the correlation between the input signal (e.g. the voltage) and the deflection and the generated force.
Application Example: Piezoelectric Ultrasonic Transducer Testing
By compression testing of the micromembrane , its stiffness, linearity and hysteresis can be determined. For the electro-mechanical testing of its actuation range and actuation force, a voltage from 0 to 200V is applied using an auxiliary amplifier and synchronized with the FT-MTA03.
Application Example: Electrostatic Micromirror Testing
Compression tests are performed at different locations along the length of the micromirror, at different distances from the rotation axis, using the FT-MTA03. From the resulting data, the rotational stiffness is calculated. For the measurement of the actuation angle and the actuation torsional moment, a voltage is applied to the electrostatic actuator while measuring the generated force or the generated deformation at a known distance from the rotation angle.
Application Example: In-Plane Electro-Thermal Actuator Testing
In this application, an electro-thermal microactuator is tested. The design features a series of six V-shaped expanding beams in a parallel configuration. The increase in temperature is achieved by electrical resistive heating of the V-shaped beams. Combined electro-mechanical testing enables the quantitative characterization of the actuator performance.