In-situ SEM Nanomechaincal Testing SystemElectrical and Mechanical NEMS TestingNanoassembly inside the SEM
In-situ SEM Nanomechaincal Testing SystemElectrical and Mechanical NEMS TestingNanoassembly inside the SEM

Overview

The FT-NMT02 Nanomechanical Testing System is a nanorobotic system for the direct and accurate, in-situ SEM/FIB measurement of the mechanical properties of nanostructures. Testing principles such as compression, tensile or fracture tests are enabled by applying a load with a microforce sensor onto the nanostructures while using position encoders to measure their deformation.

From the resulting force-versus-deformation (stress-versus-strain) curves, the material properties of these nanostructures are quantitatively determined. Furthermore, through the combination with sample holders that feature electrical connections, the combined electro-mechanical properties of nanostructures can be quantified.

The FT-NMT02 consists of a 3-axis nanopositioning unit with 3-axis integrated optical encoders, a sensor head and a SEM sample holder mounted on a two-axis, motorized rotation platform. The FT-MNT02 is fully compatible with the FemtoTools FT-S Microforce Sensing Probes and FT-G Microgrippers. Furthermore, four electrical connections are available as plug or bonding pads next to the sample holder. Using e.g. wire bonding, this allows the electrical connection of the sample and thus enables the combined electro-mechanical testing in the nanoscale.

We provide mechanical adapter bases and electrical feedtroughs for almost any scanning electron microscope system.