In-situ SEM mechanical NEMS/MEMS testingNanofiber and Nanopillar testing with EBSDFT-NMT03 in situ SEM nanoindenterFT-NMT03 ComponentsFT-MNT02 electrical SEM feedtrough
In-situ SEM mechanical NEMS/MEMS testingNanofiber and Nanopillar testing with EBSDFT-NMT03 in situ SEM nanoindenterFT-NMT03 ComponentsFT-MNT02 electrical SEM feedtrough

3-Axis Testing Platform with 2-axis Sample Stage

The FT-NMT03 features a 3-axis nanopositioning platform with nanometer-resolution for the mounting of FT-S Force Sensing Probes and FT-G Microgrippers. The sample holder is a motorized, 2-axis rotation stage (pitch/jaw) for mechanical testing at different angles. All linear axes are equipped with optical position encoders for closed-loop operation and automated measurement tasks. Optionally, the rotational axes can be equipped with encoders also.

High Resolution Piezoscanner

A linear, flexure-based piezo-scanner with capacitive position feedback enables fast and continous measurements with a resolution down to 0.05 nm. 

SEM Stub and Electrical Testing Module

Adapter units for mounting the SEM stub at different heights are provided to enable testing at the optical working distance of the SEM. Besides the standard SEM stubs, sample holders with electrical pads/connections are provided for simultaneous electrical and mechanical MEMS/NEMS testing.

Mounting Base and Electrical Feedtrough

We provide mechanical adapter bases and electrical feedtroughs for almost any scanning electron microscope system.

FemtoTools Software Suite

The software suite for MS Windows enables plug-and-measure type nanomechanical testing (e.g. Compression/tensile testing, nanoindentation, cyclic testing, creep testing, automated line/array measurements) and nanoassembly. A library based on NI LabVIEW for the creation of customized micromechanical testing programs is provided as well.