The main components of the FT-MTA03 Micromechanical Testing and Assembly System include the Micromechanical Testing Module and the Microscope Module.
The micromechanical testing module includes a 2-axis microscope positioning stage, a 3-axis piezoscanner, a FT-S Microforce Sensing Probe and a 3-axis nanopositioning platform (stick-slip actuation). All these positioners are motorized and can be controlled with the FemtoTools software suite. The combination of actuators and sensors enables the user-friendly micromechanical and topographical metrology and the precise tip-to-sample alignment. For large range measurements, the piezoelectric stick-slip actuator can perform mechanical tests along three axes over a range of up to 29 mm with a position resolution of 1 nm. For short range measurements, the 3-axis piezoscanner is used to measure over a range of up to 50 μm with a position resolution of 0.1 nm along three axes. Furthermore, the piezoscanner is especially well suited for fast, continuous measurements.
The high performance FT-MTA03 digital microscope module has an extremely large working distance of 95 mm. The microscope can be tilted over a range of 180° around the sample. This enables the visualization of the sample at different angles while avoiding that the sensor or microgripper obstructs the view of the sample. The microscope also features a 7:1 motorized optical zoom and motorized focus, to observe samples within a field of view ranging from 9.5 mm x 7.1 mm down to 1.4 mm x 1.0 mm. Three different adjustable LED illumination principles can be selected: Coaxial through-the-lens illumination, ringlight and diffuse backlight.
|Please refer to page 3-8 of the FT-MTA03 Brochure|