FT-MPS02 MEMS Probestation DimensionsFT-MPS02 MEMS Probestation DimensionsFT-MPS02 MEMS Probestation DimensionsFT-MPS02 MEMS Probestation Dimensions
FT-MPS02 MEMS Probestation DimensionsFT-MPS02 MEMS Probestation DimensionsFT-MPS02 MEMS Probestation DimensionsFT-MPS02 MEMS Probestation Dimensions

Micromechanical Testing Module Specifications:

  • Fast, point-and-shoot measurements
  • Low-drift force measurement from 5 nN to 100 mN
  • Displacement sensing range 15mm x 10mm x 60mm
  • Hardware-level sensor protection mode
  • Can measure in horizontal and vertical direction
  • Axial force application (no tip-slippage)
  • Rotatable sensor mount for in-plane and out-of-plane sensing
  • Module is fully retractable when system is not in use

Dual Microscope Specifications:

  • Observation angle 0° (topview) and 50° (sideview)
  • Two 3MP CMOS digital cameras (2048 x 1536 pixels)
  • Motorized 1:7 optical zoom (topview camera)
  • Three LED illumination modes (coaxial, sidelight, backlight)

Probe Station, Electrical Sources and Meters Specifications:

  • 200mm (8 inch) wafer chuck with 150mm travel range and 360° rotation
  • Sample fixation by vacuum or mechanical clamps
  • 2 platforms for electrical probes, 15mm vertical travel range
  • Electrical probe fixation by vacuum or magnetic force
  • Voltage output (0-300V), current output (+-50mA)
  • Multimeter (+-400V, +-50mA)