Standard microfabrication processes are limited to a planar fabrication and do not allow for the creation of complex three-dimensional structures. Additionally, only certain combinations of different materials are possible, limiting the functionality of such microfabricated devices and systems. For the development of true three-dimensional hybrid microelectromechanical systems (MEMS), microassembly is required.
For a biomedical application, soft-magnetic electroplated nickel structures had to be assembled to a three dimensional shape. The FT-MTA02 Micromechanical Testing and Assembly Station has been used for this assembly task. First, a FT-G102 Microgripper has been mounted on the FT-RS1002 Microrobotic System using the adapter tool mounts. Closed-loop control of the gripping force has been used to improve the reliability of the handling process. Subsequently, the assembled parts are then combined with a silicon-based microsensor.